STOCKER

STOCKER is used for the transfer and storage of wafer carriers between production processes in semiconductor cleanrooms. This device supports efficient access to SEMI standard vehicles such as FOUP, Cassette, Magazine, and Tray, and can achieve AMR and OHT docking. It is compatible with manual loading and unloading modes and strictly follows the cleanroom FED-209E and SEMI E88 (Stocker SEM) specifications, meeting the stringent requirements of high cleanliness environment, high throughput efficiency, and intelligent management.

Category:
Share

Related products

Composite robots have integrated operational capabilities for movement, grasping, and handling, with high precision, flexibility, scalability, ease of operation, and human-machine collaboration. They can support rapid integration and landing in different scenarios, simplify complex material handling scenarios, and achieve more efficient industrial automation.

Example Text: Summary Description Text Device Summary Description Text

Example Text: Summary Description Text Device Summary Description Text

 
 

 

Technical highlights

  • Modular design: Modular stacking crane clamps and other components shorten delivery time and achieve fast delivery
  • High speed cycle: The high-speed stacker crane has a fast speed, and the high-speed robotic arm has a fast cycle
  • Safe and stable: multiple anti drop measures, safety PLC power-off brake, ensuring material and human-machine safety
  • High scalability: Supports the installation of N2/CDA purification function and is compatible with automatic docking with OHT, AGV, IAR, and OHCV

 

Product specifications and parameters

name

STOCKER

load

20kg

Storage support products

FOUP、CASSETTE、Magazine、Tray

Size/Storage Capacity

Customizable (2.1 * 8 * 2.8m prototype)

Import and export docking

ARV/OHT/manual

Accuracy of retrieval and placement

±0.5mm

walk

speed

2m/s

acceleration

2m/s²

improve

speed

1.8m/s

acceleration

2m/s²

Cleanliness level

ISO Class 100、Class 1000

Optional

N ₂ sealing function*

Sorter function

 

stacker

The lifting speed is 2m/s; Motor power: 2kw
Walking speed of 2m/s; Motor power: 1.5KW;
Forklift telescopic speed: 0.75m/s; Rotation time: 1 second;
FOUP fork extension motor power: 750W;
MGZ fork extension motor power: 400W;
Walking barcode positioning: accuracy ± 0.5mm