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STOCKER is used for the transfer and storage of wafer carriers between production processes in semiconductor cleanrooms. This device supports efficient access to SEMI standard vehicles such as FOUP, Cassette, Magazine, and Tray, and can achieve AMR and OHT docking. It is compatible with manual loading and unloading modes and strictly follows the cleanroom FED-209E and SEMI E88 (Stocker SEM) specifications, meeting the stringent requirements of high cleanliness environment, high throughput efficiency, and intelligent management.
Composite robots have integrated operational capabilities for movement, grasping, and handling, with high precision, flexibility, scalability, ease of operation, and human-machine collaboration. They can support rapid integration and landing in different scenarios, simplify complex material handling scenarios, and achieve more efficient industrial automation.
Technical highlights
Product specifications and parameters
name |
STOCKER |
|
load |
20kg |
|
Storage support products |
FOUP、CASSETTE、Magazine、Tray |
|
Size/Storage Capacity |
Customizable (2.1 * 8 * 2.8m prototype) |
|
Import and export docking |
ARV/OHT/manual |
|
Accuracy of retrieval and placement |
±0.5mm |
|
walk |
speed |
2m/s |
acceleration |
2m/s² |
|
improve |
speed |
1.8m/s |
acceleration |
2m/s² |
|
Cleanliness level |
ISO Class 100、Class 1000 |
|
Optional |
N ₂ sealing function* |
|
Sorter function |
stacker
The lifting speed is 2m/s; Motor power: 2kw
Walking speed of 2m/s; Motor power: 1.5KW;
Forklift telescopic speed: 0.75m/s; Rotation time: 1 second;
FOUP fork extension motor power: 750W;
MGZ fork extension motor power: 400W;
Walking barcode positioning: accuracy ± 0.5mm